Requirements for Oil-Free Air Compressor Systems in Semiconductor Plants
Semiconductor manufacturing places extremely stringent demands on compressed-air cleanliness; oil‑containing particulates can contaminate wafer production lines. Oil-free screw compressors, with their fully oil‑free lubrication design, have become the core air‑supply equipment in cleanrooms. In the Nantong area, such equipment must rigorously meet the ISO 8573‑1 Class 0 standard to ensure zero oil content in the discharged air.
Key Stages in Compressor Commissioning
- Calibration of Pressure and Temperature Parameters in the Air Circuit and Cooling System
- Verification of Main Unit Synchronizing Gear Phase and Rotor Clearances
- Validation of Interlock Logic Between the Dryer, Filters, and Air Compressor
- Leakage Rate Testing of Clean Piping (≤0.1% /h)
Common Faults and Maintenance Highlights
During operation, if exhaust temperature rises abnormally, pressure fluctuates significantly, or the dew point exceeds specifications, key areas to inspect include: clogged intake filters, degraded cooling fan performance, worn precision bearings, and sensor drift in the control system. Repairs must be carried out in a clean environment, and all seals and filter elements must comply with cleanliness grade requirements to prevent secondary contamination.
Localized Service Support
Nantong and its surrounding regions host a dense concentration of semiconductor production facilities, making rapid on‑site commissioning and maintenance capabilities essential. It is recommended to establish a regular condition‑monitoring regime, leveraging trend analysis of vibration, temperature, and current data to proactively identify potential failure risks and ensure the continuity and stability of gas supply to the production lines.